2 MeV Si ion implantation damage in relaxed Si1- xGex

C. O'Raifeartaigh, R.C. Barklie, A. Nylandsted Larsen, F. Priolo, G. Franzó, G. Lulli, M. Bianconi, J.K.N. Lindner, F. Cristiano, P.L.F. Hemment

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)165-168
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number1-4
Publication statusPublished - 1996

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