Dopant activation in Sb-implanted relaxed Si1- xGex alloy layers grown on compositionally graded buffers

C. O'Raifeartaigh, A.N. Larsen, F. Cristiano, P.L.F. Hemment

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)579-585
Number of pages7
JournalApplied Physics A Materials Science & Processing
Issue number6
Publication statusPublished - 1995

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