EPR study of defects produced by MeV Ag ion implantation into silicon

C O'Raifeartaigh, RC Barklie, JKN Lindner

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)442-448
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume217
Issue number3
Publication statusPublished - 2004

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