Ion implantation induced damage in relaxed Si 1-x Ge x

RC Barklie, C O'Raifeartaigh, A Nylandsted-Larsen, F Priolo, G Lulli, JJ Grob, A Mesli, JKN Lindner, F Cristiano, PLF Hemment

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the 11th International Conference on Ion Implantation Technology
Publication statusPublished - 1996

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