Original language | Undefined/Unknown |
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Title of host publication | Proceedings of the 11th International Conference on Ion Implantation Technology |
Publication status | Published - 1996 |
Ion implantation induced damage in relaxed Si 1-x Ge x
RC Barklie, C O'Raifeartaigh, A Nylandsted-Larsen, F Priolo, G Lulli, JJ Grob, A Mesli, JKN Lindner, F Cristiano, PLF Hemment
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review