Ion implantation induced damage in relaxed Si/sub 1-x/Ge/sub x

Cormac C. O'Raifeartaigh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of 11th International Conference on Ion Implantation Technology
Publication statusPublished - 1996

Cite this