MeV ion implantation induced damage in relaxed Si 1- x Ge x

A Nylandsted Larsen, C O’Raifeartaigh, RC Barklie, B Holm, F Priolo, G Franzo, G Lulli, M Bianconi, R Nipoti, JKN Lindner

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)2208-2218
Number of pages11
JournalJournal of Applied Physics
Issue number5
Publication statusPublished - 1997
Externally publishedYes

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