Recent increases in reflectance at 6.x nm of La/B4C multilayer mirrors has led to the adoption of this wavelength for the development of future sources for lithography. The emission from laser produced plasmas of Gd and Tb emit strongly in this wavelength region. The transitions responsible and the optimum plasma conditions for optimum emission have been identified both theoretically and experimentally.
|Journal||Journal of Physics: Conference Series|
|Issue number||PART 15|
|Publication status||Published - 2012|
|Event||27th International Conference on Photonic, Electronic and Atomic Collisions, ICPEAC 2011 - Belfast, United Kingdom|
Duration: 27 Jul 2011 → 02 Aug 2011