Temperature induced expansion can result in unwanted movements along all axes of precision positioning stages. As part of the development of such a stage, finite element analysis techniques were applied to test design configurations and to facilitate the convergence on optimum solutions. This extended abstract presents is a sample of the FEA work done in the design of an XY flexure stage which will form the basis for a new XYZ contouring system. A previous paper outlining in a more general context the development of this stage entitled "Movement at nano resolution in a noisy environment" was presented at the 2004 International Manufacturing Conference in Limerick, Ireland.
|Number of pages||4|
|Publication status||Published - 2005|
|Event||5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France|
Duration: 08 May 2005 → 11 May 2005
|Conference||5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005|
|Period||08/05/2005 → 11/05/2005|