Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imaging

Bowen Li, Akira Endo, Takamitsu Otsuka, Colm O'Gorman, Thomas Cummins, Tony Donnelly, Deirdre Kilbane, Weihua Jiang, Takeshi Higashiguchi, Noboru Yugami, Padraig Dunne, Gerry O'Sullivan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

8 Citations (Scopus)

Abstract

An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved transition array) emission of highly ionized Sn is optimized for high conversion efficiency and full recovery of the injected fuel is realized through ion deflection in a magnetic field. By use of a low-density target, satellite emission is suppressed and full ionization attained with short pulse CO 2 laser irradiation. The UTA is scalable to shorter wavelengths, and Gd is shown to have similar conversion efficiency to Sn (13.5 nm) at a higher plasma temperature, with a narrow spectrum centered at 6.7 nm, where a 70% reflectivity mirror is anticipated. Optimization of short pulse CO2 laser irradiation is studied, and further extension of the same method is discussed, to realize 100 W average power down to a wavelength of 3 nm.

Original languageEnglish
Title of host publicationAdvances in X-Ray/EUV Optics and Components VI
DOIs
Publication statusPublished - 2011
Externally publishedYes
EventAdvances in X-Ray/EUV Optics and Components VI - San Diego, CA, United States
Duration: 22 Aug 201124 Aug 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8139
ISSN (Print)0277-786X

Conference

ConferenceAdvances in X-Ray/EUV Optics and Components VI
Country/TerritoryUnited States
CitySan Diego, CA
Period22/08/201124/08/2011

Keywords

  • Extreme ultraviolet
  • LPP
  • Rare-earth
  • Unresolved transition array (UTA)
  • Water window

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