Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources

Takamitsu Otsuka, Deirdre Kilbane, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Weihua Jiang, Akira Endo, Padraig Dunne, Gerry O'Sullivan

Research output: Contribution to journalArticlepeer-review

50 Citations (Scopus)

Abstract

We have investigated the dependence of the spectral behavior and conversion efficiencies of rare-earth plasma extreme ultraviolet sources with peak emission at 6.7 nm on laser wavelength and the initial target density. The maximum conversion efficiency was 1.3% at a laser intensity of 1.6× 1012 W/ cm2 at an operating wavelength of 1064 nm, when self-absorption was reduced by use of a low initial density target. Moreover, the lower-density results in a narrower spectrum and therefore improved spectral purity. It is shown to be important to use a low initial density target and/or to produce low electron density plasmas for efficient extreme ultraviolet sources when using high- Z targets.

Original languageEnglish
Article number231503
JournalApplied Physics Letters
Volume97
Issue number23
DOIs
Publication statusPublished - 06 Dec 2010
Externally publishedYes

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