This thesis presents a systematic program of improvements to an automatic micron level precision ball bearing measurement instrument system to achieve submicron measurement performance. Progressing from relocation of instrumentation and its subsequent reinstallation and re-commissioning, it describes the upgrade work to achieve the targeted performance improvements and the subsequent testing and experimentation to identify the improvements achieved. A significant body of work aimed at improving the reliability of the overall system has also been completed. The end result is a very significantly improved measurement system. Key factors leading to the targeted single micron performance level have been identified and tested and other factors affecting the final performance have been identified.
|Publication status||Submitted - 2010|
- Sub-Micron Measurement; Flexure Stage; Piezo Actuation